Fabrication of MEMS components using ultrafine-grained aluminium alloys
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2010
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/20/4/045029